The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Sep. 04, 2007
Vladimir A. Ukraintsev, Allen, TX (US);
Vladimir A. Ukraintsev, Allen, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Provided is a method for manufacturing a semiconductor device. The method, in one embodiment, includes calibrating an inspection tool configured to obtain a measurement of a semiconductor feature, including: 1) providing a test structure comprising a substrate having a trench therein, and a post feature located over the substrate adjacent the trench. The post feature, in this embodiment, includes a second layer positioned over a first layer, wherein the first layer has a notch or bulge in a sidewall thereof; 2) finding a location of the notch or bulge relative to a different known point of the test structure using a probe of the inspection tool; and 3) calculating a dimension of the probe using the relative locations of the notch or bulge and the different known point.