The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Jun. 21, 2010
Kazufumi Suenaga, Tsuchiura, JP;
Kenji Shibata, Tsukuba, JP;
Hideki Sato, Hamamatsu, JP;
Akira Nomoto, Kasumigaura, JP;
Kazufumi Suenaga, Tsuchiura, JP;
Kenji Shibata, Tsukuba, JP;
Hideki Sato, Hamamatsu, JP;
Akira Nomoto, Kasumigaura, JP;
Hitachi Cable, Ltd., Tokyo, JP;
Abstract
To provide a piezoelectric thin film element capable of improving piezoelectric characteristics and realize a piezoelectric thin film device with high performance and high reliability, comprising: a substrate; and a piezoelectric thin film formed on the substrate by a sputtering method, with perovskite oxide expressed by (NaKLi)NbO(0≦x≦1, 0≦y≦1, 0≦z≦0, 2, x+y+z=1) as a main phase, wherein an absolute value of an internal stress of the piezoelectric thin film is 1.6 GPa or less.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile