The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Nov. 01, 2005
Toshiaki Kaminaga, Hitachinaka, JP;
Masahide Hayashi, Tokyo, JP;
Katsumichi Ueyanagi, Matsumoto, JP;
Kazunori Saito, Matsumoto, JP;
Mutsuo Nishikawa, Matsumoto, JP;
Toshiaki Kaminaga, Hitachinaka, JP;
Masahide Hayashi, Tokyo, JP;
Katsumichi Ueyanagi, Matsumoto, JP;
Kazunori Saito, Matsumoto, JP;
Mutsuo Nishikawa, Matsumoto, JP;
Fuji Electric Co., Ltd., Kawasaki, JP;
Abstract
An object of the present invention is to solve problems in that aluminum electrodes, aluminum wires, and I/O terminals are corroded by corrosive gasses when a pressure of a pressure medium containing corrosive matters such as exhaust gas is measured with a semiconductor sensor; and improve not only the corrosion resistance of the sensor chip but also the corrosion resistance of the portion particularly functioning as the pressure receiver. Each of the aluminum electrodes that is likely to be corroded portions is prevented from being corroded by forming a titanium-tungsten layer and gold layer on the aluminum electrode. The connecting wires are prevented from being corroded by corrosive matters by using gold wires. The I/O terminals are also prevented from being corroded by applying gold plating.