The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Sep. 17, 2009
Tomoe Yamamoto, Kawasaki, JP;
Tomohisa Iino, Kawasaki, JP;
Tomoe Yamamoto, Kawasaki, JP;
Tomohisa Iino, Kawasaki, JP;
Renesas Electronics Corporation, Kanagawa, JP;
Abstract
A vapor phase deposition apparatusfor forming a thin film comprising a chamber, a piping unitfor supplying a source material of the thin film into the chamberin a gaseous condition, a vaporizerfor vaporizing the source material in a source material containerand supplying the vaporized gas in the piping unitand a temperature control unit, is presented. The temperature control unitcomprises: a first temperature control unit, which is composed of a heater controller unitand a tape heaterand is capable of controlling the temperature of the first pipingin the piping unitthat is directly connected to the chamber; a second temperature control unit, which is composed of a heater controller unitand a tape heaterand is capable of controlling the temperature of the second pipingthat is connected to the vaporizer; and a third temperature control unit, which is composed of a heater controller unitand a thermostatic chamberand is capable of controlling the temperature of the valve
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile