The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Feb. 22, 2007
Applicant:
Roger Proksch, Santa Barbara, CA (US);
Inventor:
Roger Proksch, Santa Barbara, CA (US);
Assignee:
Asylum Research Corporation, Santa Barbara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/20 (2010.01); G01D 11/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes.