The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2012

Filed:

May. 30, 2008
Applicants:

Toru Fukano, Kyoto, JP;

Junya Nishii, Kyoto, JP;

Inventors:

Toru Fukano, Kyoto, JP;

Junya Nishii, Kyoto, JP;

Assignee:

Kyocera Corporation, Kyoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating a small and low-profile surface acoustic wave device which can be formed collectively by a wafer process without causing deterioration in characteristics is provided. The surface acoustic wave device has a piezoelectric substrate, an IDTformed on one major surface of the piezoelectric substrateand having at least one comb-shaped electrode, and a protective coverforming a hollow containing spacewith the one major surface by covering the IDTabove the one major surface. The protective coveris provide with a through holeand composed, at least partially, of a photocurable material containing an acid generator which contains fluorine.


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