The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2012
Filed:
Apr. 23, 2010
Lior Kogut, Haifa, IL;
Chun-ming Wang, Fremont, CA (US);
Chengbin Qui, Cupertino, CA (US);
Stephen Zee, San Jose, CA (US);
Fan Zhong, Fremont, CA (US);
Lior Kogut, Haifa, IL;
Chun-Ming Wang, Fremont, CA (US);
Chengbin Qui, Cupertino, CA (US);
Stephen Zee, San Jose, CA (US);
Fan Zhong, Fremont, CA (US);
QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);
Abstract
Embodiments of MEMS devices include support structures having substantially vertical sidewalls. Certain support structures are formed through deposition of self-planarizing materials or via a plating process. Other support structures are formed via a spacer etch. Other MEMS devices include support structures at least partially underlying a movable layer, where the portions of the support structures underlying the movable layer include a convex sidewall. In further embodiments, a portion of the support structure extends through an aperture in the movable layer and over at least a portion of the movable layer.