The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2012
Filed:
Jun. 24, 2009
Junji Shigematsu, Ibaraki, JP;
Kunishige Edamatsu, Toyonaka, JP;
Takayuki Miyagawa, Toyonaka, JP;
Akira Kamabuchi, Kobe, JP;
Junji Shigematsu, Ibaraki, JP;
Kunishige Edamatsu, Toyonaka, JP;
Takayuki Miyagawa, Toyonaka, JP;
Akira Kamabuchi, Kobe, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
The present invention provides a chemically amplified resist composition comprising: wherein Rrepresents a hydrogen atom or a methyl group, ring Xrepresents an unsubstituted or substituted C3-C30 cyclic hydrocarbon group having —COO— and k represents an integer of 1 to 4, wherein Rrepresents a hydrogen atom, a methyl group or a trifluoromethyl group, and
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile