The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2012
Filed:
Nov. 04, 2010
Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers
Boris Kobrin, Walnut Creek, CA (US);
Jeffrey D. Chinn, Foster City, CA (US);
Romuald Nowak, Cupertino, CA (US);
Richard C. Yi, Santa Cruz, CA (US);
Boris Kobrin, Walnut Creek, CA (US);
Jeffrey D. Chinn, Foster City, CA (US);
Romuald Nowak, Cupertino, CA (US);
Richard C. Yi, Santa Cruz, CA (US);
Applied MicroStructures, Inc., San Jose, CA (US);
Abstract
An improved vapor-phase deposition method and apparatus for the application of multilayered films/coatings on substrates is described. The method is used to deposit multilayered coatings where the thickness of an oxide-based layer in direct contact with a substrate is controlled as a function of the chemical composition of the substrate, whereby a subsequently deposited layer bonds better to the oxide-based layer. The improved method is used to deposit multilayered coatings where an oxide-based layer is deposited directly over a substrate and a SAM organic-based layer is directly deposited over the oxide-based layer. Typically a series of alternating layers of oxide-based layer and organic-based layer are applied.