The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2012
Filed:
Sep. 25, 2008
Dong-soon Hwang, Chungcheongnam-do, KR;
Tae-in Kim, Gyeonggi-do, KR;
Sung-jin Hong, Chungcheongnam-do, KR;
Dong-Soon Hwang, Chungcheongnam-do, KR;
Tae-In Kim, Gyeonggi-do, KR;
Sung-Jin Hong, Chungcheongnam-do, KR;
Semes Co. Ltd, Chungcheongnam-Do, KR;
Abstract
Provided are a substrate support unit and a substrate treating apparatus and method using the same. The substrate support unit includes a first support part and a second support part. The first support part is movable in a first direction. The first support part supports a first portion of a substrate in which a processing fluid is supplied in a direction corresponding to the first direction. The second support part is movable in a second direction. The second support part supports a second portion of the substrate. At least one of the first support part and the second support part supports the substrate while the processing fluid is supplied.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile