The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2012

Filed:

Oct. 21, 2010
Applicant:

Yi LI, Shenzhen, CN;

Inventor:

Yi Li, Shenzhen, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/59 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
Abstract

A movable deposition box () for silicon-based thin film solar cell comprises an electrode array composed of at least a group of cathode plates () and a piece of anode plate () which are set in movable chamber, wherein a feeding socket (-) is positioned on a circular or semicircular concave surface in the center area on the backside of the cathode plates (), a circular or semicircular end face (-) of a feeding component () which has a flat middle part contacts the signal feeding socket (-) and feeds in RF/VHF power signal, the anode plate () is grounded, and a shield cover () of the cathode plate has through-hole (-) and is insulated from the cathode plate ().


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