The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Nov. 25, 2009
Akira Arakawa, Kyoto, JP;
Takahiro Mori, Kyoto, JP;
Tsunehiro Inoue, Ominhachiman, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
The present invention provides a particle counter capable of accurately discriminating the signal of scattered light by real particles from the background light noise, and furthermore, capable of detecting smaller particles than conventional particle counters. The particle counter according to the present invention includes: a light irradiator for emitting light to the measurement areain a vacuum state or in a near vacuum state; a scattered light detectorfor detecting scattered light generated when the light is delivered to the measurement area; a discriminatorfor determining whether or not a particle exists in the measurement areaby comparing the detection signal of the scattered light detectorand a predetermined discrimination threshold; a vacuum gaugefor measuring the pressure of the measurement area; and the threshold setting unitfor setting a discrimination threshold in accordance with the pressure of the measurement area