The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Jul. 30, 2008
Werner Kadrnoschka, Germering, DE;
Anton Lebeda, Neubiberg, DE;
Rainer Killinger, Recklinghausen, DE;
Johann Mueller, Munich, DE;
Stefan Weis, Weilburg, DE;
Werner Kadrnoschka, Germering, DE;
Anton Lebeda, Neubiberg, DE;
Rainer Killinger, Recklinghausen, DE;
Johann Mueller, Munich, DE;
Stefan Weis, Weilburg, DE;
Astrium GmbH, Munich, DE;
Abstract
A device for coupling ionization energy into an ion or electron source, which is excited inductively or inductively-capacitively is provided. The device includes: a discharge vessel for a gas, which is to be ionized; a coupling coil, which is wound around the discharge vessel and feeds in a high frequency energy, which is required for plasma excitation; a coupling capacitor, which is electrically coupled to the coupling coil; a high frequency generator, which is electrically coupled to the coupling coil. The high frequency generator forms, together with the at least one coupling capacitor, a resonant circuit. The high frequency generator includes a PLL controller for automatic impedance matching of the resonant circuit, so that the resonant circuit can be driven at a resonant frequency.