The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Nov. 17, 2008
Guenter Klemm, Nidda, DE;
Volker Hacker, Altenstadt-Oberau, DE;
Hans-georg Lotz, Gruendau-Rothenbergen, DE;
Guenter Klemm, Nidda, DE;
Volker Hacker, Altenstadt-Oberau, DE;
Hans-Georg Lotz, Gruendau-Rothenbergen, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A linear plasma electron source is provided. The linear plasma electron source includes a housing acting as a first electrode, the housing having side walls a slit opening in the housing for trespassing of a electron beam, the slit opening defining a length direction of the source, a second electrode being arranged within the housing and having a first side facing the slit opening, the first side being spaced from the slit opening by a first distance, wherein the length of the electron source in the length direction is at least 5 times the first distance, and at least one gas supply for providing a gas into the housing.