The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Jun. 09, 2008
Takaaki Shimizu, Niigata, JP;
Kyoji Oguro, Niigata, JP;
Takaaki Shimizu, Niigata, JP;
Kyoji Oguro, Niigata, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
Methods for producing trichlorosilane, including: reacting a tetrachlorosilane containing substance with hydrogen at a temperature of 400° C. to 1,200° C. to obtain a mixture including silane, monochlorosilane, dichlorosilane, and trichlorosilane; removing impurities which are electrically active in a semiconductor crystal from the mixture; separating the trichlorosilane from the silane, monochlorosilane and dichlorosilane to obtain purified trichlorosilane; and circulating the silane, monochlorosilane and dichlorosilane obtained from the separating step into the reacting step.