The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
May. 21, 2008
Kyung Hyun Kim, Daejeon, KR;
Chul Huh, Daejeon, KR;
Hyun Sung Ko, Daejeon, KR;
Jong Cheol Hong, Daejeon, KR;
Wan Joong Kim, Gyunggi-do, KR;
Gun Yong Sung, Daejeon, KR;
Seon Hee Park, Daejeon, KR;
Kyung Hyun Kim, Daejeon, KR;
Chul Huh, Daejeon, KR;
Hyun Sung Ko, Daejeon, KR;
Jong Cheol Hong, Daejeon, KR;
Wan Joong Kim, Gyunggi-do, KR;
Gun Yong Sung, Daejeon, KR;
Seon Hee Park, Daejeon, KR;
Electronics and Telecommunications Research Institute, Daejeon, KR;
Abstract
There are provided an apparatus for fixing a plastic sheet which fixes a plastic sheet to fabricate a nano pattern and a method of fabricating a nano pattern on a plastic sheet using the same. The apparatus for fixing a plastic sheet includes: a pair of planar metal guide rings interposingly fixing a plastic sheet from above and below, respectively; and a sheet fixing chuck including: a ring fixer sucking the pair of planar metal guide rings through a vacuum groove to be fixed thereto; and a sheet fixer having a plurality of vacuum pin holes formed therein, the vacuum pin holes sucking a bottom of the plastic sheet fixed by the planar metal guide rings. The apparatus allows fabrication of the nano pattern on the plastic sheet having less roughness than that of a semiconductor substrate or a glass substrate.