The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Sep. 27, 2010
Applicants:
Dale W. Schroeder, Santa Clara, CA (US);
Richard P. Tella, Sunnyvale, CA (US);
Inventors:
Dale W. Schroeder, Santa Clara, CA (US);
Richard P. Tella, Sunnyvale, CA (US);
Assignee:
Agilent Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/24 (2010.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.