The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Apr. 13, 2011
Clarence Chui, San Jose, CA (US);
William Cummings, Clinton, WA (US);
Brian Gally, Los Gatos, CA (US);
Lior Kogut, Haifa, IL;
Ming-hau Tung, San Francisco, CA (US);
Yeh-jiun Tung, Sunnyvale, CA (US);
Chih-wei Chiang, Hsin-Chu, TW;
Denis Endisch, Cupertino, CA (US);
Clarence Chui, San Jose, CA (US);
William Cummings, Clinton, WA (US);
Brian Gally, Los Gatos, CA (US);
Lior Kogut, Haifa, IL;
Ming-Hau Tung, San Francisco, CA (US);
Yeh-Jiun Tung, Sunnyvale, CA (US);
Chih-Wei Chiang, Hsin-Chu, TW;
Denis Endisch, Cupertino, CA (US);
Qualcomm Mems Technologies, Inc., San Diego, CA (US);
Abstract
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.