The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Nov. 24, 2010
Anna Pomarico, Collepasso Lucce, IT;
Pasquale Flora, San Marzano Di San Giuseppe, IT;
Annarita Morea, Massafra, IT;
Giuditta Roselli, Minervino Murge, IT;
Anna Pomarico, Collepasso Lucce, IT;
Pasquale Flora, San Marzano Di San Giuseppe, IT;
Annarita Morea, Massafra, IT;
Giuditta Roselli, Minervino Murge, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.