The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Sep. 06, 2006
Hidehisa Murase, Kanagawa, JP;
Yoshinari Sasaki, Tokyo, JP;
Kosei Aso, Kanagawa, JP;
Naoki Yamada, Kanagawa, JP;
Hidehisa Murase, Kanagawa, JP;
Yoshinari Sasaki, Tokyo, JP;
Kosei Aso, Kanagawa, JP;
Naoki Yamada, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
A laser processing apparatus is provided. The laser processing apparatus removes and extracts debris generated by irradiating a transparent resin layer formed on a substrate with laser light during a patterning process, and includes a debris extraction module provided on the upper side of the substrate, wherein the debris extraction module sucks and extracts debris due to sublimation, thermal processing and composite action thereof generated from the transparent resin layer on the substrate irradiated with the laser light from the lower side thereof.