The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Apr. 28, 2009
Chienliu Chang, Kawasaki, JP;
Chienliu Chang, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a method of manufacturing a capacitive electromechanical transducer, a first electrode () is formed on a substrate (), an insulating layer () which has an opening () leading to the first electrode is formed on the first electrode (), and a sacrificial layer is formed on the insulating layer. A membrane () having a second electrode () is formed on the sacrificial layer, and an aperture is provided as an etchant inlet in the membrane. The sacrificial layer is etched to form a cavity (), and then the aperture serving as an etchant inlet is sealed. The etching is executed by electrolytic etching in which a current is caused to flow between the first electrode () and an externally placed counter electrode through the opening () and the aperture of the membrane.