The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Nov. 18, 2008
Sheng-hung Wang, Shulin, TW;
Ming-long Chiu, Shulin, TW;
Sheng-Hung Wang, Shulin, TW;
Ming-Long Chiu, Shulin, TW;
Gudeng Precision Industrial Co., Ltd., New Taipei, TW;
Abstract
A gas filling apparatus for filling a gas into a storage apparatus for storing a semiconductor element or a reticle is provided. The gas filling apparatus is connected with an air feed source, which includes a base, a first inlet port and a set of air feed source route. The storage apparatus is loaded on the base, and the first inlet port which is disposed on the base corresponds with the second inlet port of the storage apparatus. The set of air feed source route includes an entrance part, a supply part and a branch part. The entrance part is connected with the air feed source, and the supply part is connected with the first inlet port. The branch part is a closed loop, which transmits the gas from the entrance part into the supply part.