The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2012
Filed:
May. 14, 2008
Applicant:
Takatoshi Ashizawa, Yokohama, JP;
Inventor:
Takatoshi Ashizawa, Yokohama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A piezoelectric actuator comprises a first piezoelectric element pre-polarized towards a first direction and displaceable towards an about orthogonal direction with respect to said first direction, a second piezoelectric element pre-polarized towards a direction about parallel to the first direction and displaceable towards a direction about parallel to said first direction, a relative moving member clamped by displacement of said first piezoelectric element and relatively moves by displacement of said second piezoelectric element.