The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2012
Filed:
Jun. 27, 2008
Ulysses Gilchrist, Reading, MA (US);
Martin Hosek, Lowell, MA (US);
Jairo Terra Moura, Marlboro, MA (US);
Jay Krishnasamy, Billerica, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
Ulysses Gilchrist, Reading, MA (US);
Martin Hosek, Lowell, MA (US);
Jairo Terra Moura, Marlboro, MA (US);
Jay Krishnasamy, Billerica, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.