The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2012
Filed:
Dec. 23, 2008
Applicant:
Bernard John Fischer, Richardson, TX (US);
Inventor:
Bernard John Fischer, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a memory cell. The method comprises forming a memory stack. Forming the memory stack includes pre-treating an insulating layerin a substantially ammonia atmosphere for a period of more than 5 minutes to thereby form a pre-treated insulating layer. Forming the memory stack also includes depositing a silicon nitride layer on the pre-treated insulating layer.