The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2012
Filed:
Feb. 21, 2007
Applicants:
Oliver Heimel, Wabern, DE;
Andreas Jischke, Kahl, DE;
Dieter Haas, Bruchkoebel, DE;
Inventors:
Assignee:
Applied Materials GmbH & Co. KG, Alzenau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23P 17/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention concerns a device for transporting substrates through vacuum chambers, especially coating machines with a substrate carrier on or at which the substrates can be arranged, wherein the substrate carrier has at least one guide rail which extends along at least one side of the substrate carrier, and wherein the guide rail is kept spaced apart from the substrate carrier by one or just a few spaced bearings.