The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2012
Filed:
May. 31, 2011
W. Karl Olander, Indian Shores, FL (US);
James V. Mcmanus, Bethel, CT (US);
Steven J. Hultquist, Chapel Hill, NC (US);
Jose I. Arno, Brookfield, CT (US);
Peter C. Van Buskirk, Newtown, CT (US);
W. Karl Olander, Indian Shores, FL (US);
James V. McManus, Bethel, CT (US);
Steven J. Hultquist, Chapel Hill, NC (US);
Jose I. Arno, Brookfield, CT (US);
Peter C. Van Buskirk, Newtown, CT (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Abstract
Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.