The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2012
Filed:
Aug. 25, 2009
Applicants:
Gregory John Mcavoy, Dublin, IE;
Vincent Patrick Lawlor, Dublin, IE;
Rónán Pádraig Seán O'reilly, Dublin, IE;
Inventors:
Gregory John McAvoy, Dublin, IE;
Vincent Patrick Lawlor, Dublin, IE;
Rónán Pádraig Seán O'Reilly, Dublin, IE;
Assignee:
Zamtec Limited, Dublin, IE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/60 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a thermal bend actuator comprises the steps of: (a) depositing a first layer comprised of silicon nitride onto a sacrificial scaffold; (b) depositing a second layer comprised of silicon dioxide onto the first layer; (c) depositing an active beam layer onto the second layer; (d) etching the active beam layer, the first layer and the second layer to define the thermal bend actuator; and (e) releasing the thermal bend actuator by removing the sacrificial scaffold.