The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Apr. 04, 2007
Ichiro Nishikawa, Kyoto, JP;
Takeshi Kawano, Uji, JP;
Ichiro Nishikawa, Kyoto, JP;
Takeshi Kawano, Uji, JP;
Horiba Stec, Co., Ltd., Kyoto-shi, JP;
Abstract
A liquid material vaporizer comprises a gas-liquid mixing section for mixing a liquid material and a carrier gas to generate a gas-liquid mixture; a heating type vaporizing section for vaporizing the gas-liquid mixture from the gas-liquid mixing section and exhausting outside with an assistance of the carrier gas a gas generated by the vaporization; a connecting section for making a connection between the gas-liquid mixing section and the vaporizing section, the connecting section having inside a flow path for the gas-liquid mixture; and a connecting section cooling section for cooling the connecting section. Thus, the liquid material vaporizer which performs suitable vaporization by preventing residue from being generated even in the case of vaporizing a liquid material composed of a plurality of materials having different boiling points.