The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Feb. 05, 2010
Mitsufumi Naoe, Kasugai, JP;
Toru Miyauchi, Kasugai, JP;
Tomoyuki Okada, Yokohama, JP;
Seiji Makino, Yokohama, JP;
Koichi Suzuki, Yokohama, JP;
Masakazu Ohseki, Yokohama, JP;
Mitsufumi Naoe, Kasugai, JP;
Toru Miyauchi, Kasugai, JP;
Tomoyuki Okada, Yokohama, JP;
Seiji Makino, Yokohama, JP;
Koichi Suzuki, Yokohama, JP;
Masakazu Ohseki, Yokohama, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
A pattern verification apparatus includes a correction section creating a plurality of first data pieces; a determination section performing light intensity simulation to create a plurality of plots, determine whether or not each of the plurality of simulation result plots falls within an allowable range, and recognize two or more simulation result plots which do not fall within the allowable range as a plurality of second data pieces; an extraction section extracting a reference pattern of the plurality of original design patterns corresponding to the plurality of second data pieces; and a classifying section classifying the plurality of second data pieces into categories of the reference pattern.