The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Oct. 28, 2009
Applicants:
Hirotake Maruyama, Itabashi-ku, JP;
Makoto Fujino, Itabashi-ku, JP;
Hirokazu Tamura, Itabashi-ku, JP;
Inventors:
Hirotake Maruyama, Itabashi-ku, JP;
Makoto Fujino, Itabashi-ku, JP;
Hirokazu Tamura, Itabashi-ku, JP;
Assignee:
Kabushiki Kaisha Topcon, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (BS) of a mirror plate (B) is formed by removing an insulating layer (I) thereon.