The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Apr. 16, 2010
Shinsuke Nakazono, Osaka, JP;
Soichiro Hiraoka, Hyogo, JP;
Jirou Terada, Osaka, JP;
Shigeo Furukawa, Osaka, JP;
Kiyomi Furukawa, Legal Representative, Osaka, JP;
Toshiaki Horie, Osaka, JP;
Kazuki Komaki, Osaka, JP;
Masaki Tada, Osaka, JP;
Yuta Yamamoto, Osaka, JP;
Shinsuke Nakazono, Osaka, JP;
Soichiro Hiraoka, Hyogo, JP;
Jirou Terada, Osaka, JP;
Shigeo Furukawa, Osaka, JP;
Kiyomi Furukawa, legal representative, Osaka, JP;
Toshiaki Horie, Osaka, JP;
Kazuki Komaki, Osaka, JP;
Masaki Tada, Osaka, JP;
Yuta Yamamoto, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.