The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Mar. 12, 2009
Hee Su Park, Daejeon, KR;
Sun Kyung Lee, Daejeon, KR;
Jae Yong Lee, Chungbuk, KR;
Sang-kyung Choi, Daejeon, KR;
Dong-hoon Lee, Daejeon, KR;
Hee Su Park, Daejeon, KR;
Sun Kyung Lee, Daejeon, KR;
Jae Yong Lee, Chungbuk, KR;
Sang-Kyung Choi, Daejeon, KR;
Dong-Hoon Lee, Daejeon, KR;
Korea Research Institute of Standards and Science, Daejeon, KR;
Abstract
Disclosed herein is a super-resolution lithography apparatus and method based on a multiple light exposure method. The super-resolution lithography apparatus comprises a photographic medium having energy levels of a first ground state, a second ground state, a first excited state, a second excited state and a quenching state; a first light source inducing energy level transition between the first ground state and the first excited state of the photographic medium; a second light source inducing energy level transition between the second ground state and the first excited state of the photographic medium; and a third light source inducing energy level transition between the second ground state and the second excited state of the photographic medium. Accordingly, the resolution of lithography can be improved simply by using a photographic medium having a simple structure and conventional laser beams and increasing the number of exposure steps. Furthermore, a multiple photon absorber that is difficult to obtain, a medium having a complicated energy level and a high-efficiency quantum optical light are unnecessary, and thus economic efficiency is improved.