The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8279398 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 02, 2012

Filed:

Jun. 09, 2009
Applicant:

Takeshi Sato, Utsunomiya, JP;

Inventor:

Takeshi Sato, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/68 (2006.01); G03B 27/52 (2006.01);
U.S. Cl.
CPC ...
Abstract

A deforming mechanism for deforming a transmissive optical element comprises a rotation member configured to hold the optical element and to rotate around an axis parallel to a tangential line of a circumference of the optical element at a portion where the rotation member holds the optical element, so as to deform the optical element by the rotation, a torque generating unit configured to generate a torque to rotate the rotation member around the axis, a holding base, and an elastic member connecting the holding base to the torque generating unit.


Find Patent Forward Citations

Sato, Takeshi. (2012). Deforming mechanism, exposure apparatus, and device manufacturing method (U.S. Patent No. 8279398). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8279398

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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