The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Jan. 04, 2010
Thoralf Kautzsch, Dresden, DE;
Marco Müller, Pima, DE;
Dirk Meinhold, Dresden, DE;
Ben Rosam, Dresden, DE;
Klaus Elian, Alteglofsheim, DE;
Stefan Kolb, Unterschleissheim, DE;
Thoralf Kautzsch, Dresden, DE;
Marco Müller, Pima, DE;
Dirk Meinhold, Dresden, DE;
Ben Rosam, Dresden, DE;
Klaus Elian, Alteglofsheim, DE;
Stefan Kolb, Unterschleissheim, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A method for providing a pressure sensor substrate comprises creating a first cavity that extends inside the substrate in a first direction perpendicular to a main surface of the substrate, and that extends inside the substrate, in a second direction perpendicular to the first direction, into a first venting area of the substrate; creating a second cavity that extends in the first direction inside the substrate, that extends in parallel to the first cavity in the second direction, and that does not extend into the first venting area; and opening the first cavity in the first venting area.