The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Mar. 31, 2010
Owen Hildreth, Pacific Grove, CA (US);
Ching Ping Wong, Berkeley Lake, GA (US);
Yonghao Xiu, Santa Clara, CA (US);
Owen Hildreth, Pacific Grove, CA (US);
Ching Ping Wong, Berkeley Lake, GA (US);
Yonghao Xiu, Santa Clara, CA (US);
Georgia Tech Research Corporation, Atlanta, GA (US);
Abstract
Disclosed herein are various embodiments related to metal-assisted chemical etching of substrates on the micron, sub-micron and nano scales. In one embodiment, among others, a method for metal-assisted chemical etching includes providing a substrate; depositing a non-spherical metal catalyst on a surface of the substrate; etching the substrate by exposing the non-spherical metal catalyst and the substrate to an etchant solution including a composition of a fluoride etchant and an oxidizing agent; and removing the etched substrate from the etchant solution.