The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Jul. 23, 2009
Akio Machida, Kanagawa, JP;
Toshio Fujino, Kanagawa, JP;
Tadahiro Kono, Kanagawa, JP;
Katsuji Takagi, Kanagawa, JP;
Shinsuke Haga, Kanagawa, JP;
Akio Machida, Kanagawa, JP;
Toshio Fujino, Kanagawa, JP;
Tadahiro Kono, Kanagawa, JP;
Katsuji Takagi, Kanagawa, JP;
Shinsuke Haga, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
A semiconductor processing apparatus includes: a stage on which a substrate having a semiconductor film to be processed is to be mounted; a supply section that supplies a plurality of energy beams onto the semiconductor film mounted on the stage in such a way that irradiation points of the energy beams are aligned at given intervals; and a control section that moves the plurality of energy beams and the substrate relative to each other in a direction not in parallel to alignment of the irradiation points of the plurality of energy beams supplied by the supply section, and scans the semiconductor film with the irradiation points of the plurality of energy beams in parallel to thereby control a heat treatment on the semiconductor film.