The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8278140 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 02, 2012

Filed:

Dec. 01, 2009
Applicants:

Ya-hui Yang, Hsinchu, TW;

Sueli Sidney Yang, Hsinchu, TW;

Chen-yu Kao, Hsinchu, TW;

Kan-san Chou, Hsinchu, TW;

Sinn-wen Chen, Hsinchu, TW;

Inventors:

Ya-Hui Yang, Hsinchu, TW;

Sueli Sidney Yang, Hsinchu, TW;

Chen-Yu Kao, Hsinchu, TW;

Kan-San Chou, Hsinchu, TW;

Sinn-Wen Chen, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for preparing IGZO particles and a method for preparing an IGZO thin film by using the IGZO particles are disclosed. The method for preparing the IGZO particles comprises the following steps: (A) providing a solution of metal acid salts, which contains a zinc salt, an indium salt, and a gallium salt; (B) mixing the solution of the metal acid salts with a basic solution to obtain an oxide precursor; and (C) heating the oxide precursor to obtain IGZO particles.


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