The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
May. 02, 2008
Applicant:
Erwan Godot, Annecy, FR;
Inventor:
Erwan Godot, Annecy, FR;
Assignee:
Alcatel Lucent, Paris, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 7/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract
A transport pod interface in one example including a sampling probe connected to a gas analyzer and an actuator coupled with an access door on the transport pod in the coupling position, and that moves said door towards the base of the interface in an retracted position in which the volume of gas to be analyzed contained within the transport pod is accessible by the sampling probe, characterized in that it includes at least one sealing joint configured such that at least when the interface is in the retracted position, the space between the actuator and said base is sealed in such a way as to isolate the volume of gas to be analyzed.