The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2012
Filed:
May. 06, 2011
Michael Rivkin, Los Altos, CA (US);
Ron Powell, Portola Valley, CA (US);
Shawn Hamilton, Boulder Creek, CA (US);
Michael Nordin, San Jose, CA (US);
Michael Rivkin, Los Altos, CA (US);
Ron Powell, Portola Valley, CA (US);
Shawn Hamilton, Boulder Creek, CA (US);
Michael Nordin, San Jose, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A semiconductor processing tool heats wafers using radiant heat and resistive heat in chamber or in a load lock where pressure changes. The wafers are heated in greater part with a resistive heat source until a transition temperature or pressure is reached, then they are heated in greater part with a radiant heat source. Throughput improves for the tool because of the wafers can reach a high temperature uniformly in seconds.