The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2012
Filed:
Oct. 07, 2008
Gwang Ho Hur, Yongin-shi, KR;
Jun Young Choi, Seoul, KR;
Cheol Won Lee, Anyang-shi, KR;
Hyun Hwan Ahn, Sungnam-shi, KR;
Young Joo Hwang, Seoul, KR;
Chun Sik Kim, Sungnam-shi, KR;
Gwang Ho Hur, Yongin-shi, KR;
Jun Young Choi, Seoul, KR;
Cheol Won Lee, Anyang-shi, KR;
Hyun Hwan Ahn, Sungnam-shi, KR;
Young Joo Hwang, Seoul, KR;
Chun Sik Kim, Sungnam-shi, KR;
Abstract
Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span.