The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Sep. 18, 2008
Jonathan S. Ehrmann, Sudbury, MA (US);
Joseph J. Griffiths, Winthrop, MA (US);
James J. Cordingley, Littleton, MA (US);
Donald J. Svetkoff, Ann Arbor, MI (US);
Shepard D. Johnson, Andover, MA (US);
Michael Plotkin, Newton, MA (US);
Jonathan S. Ehrmann, Sudbury, MA (US);
Joseph J. Griffiths, Winthrop, MA (US);
James J. Cordingley, Littleton, MA (US);
Donald J. Svetkoff, Ann Arbor, MI (US);
Shepard D. Johnson, Andover, MA (US);
Michael Plotkin, Newton, MA (US);
GSI Group Corporation, Bedford, MA (US);
Abstract
The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.