The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Nov. 05, 2009
Applicants:
Akito Takahashi, Otsu, JP;
Yukimasa Furukawa, Kusatsu, JP;
Yuki Tanaka, Kyoto, JP;
Inventors:
Assignee:
Horiba STEC, Co., Ltd., Kyoto-shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 7/00 (2006.01); F17D 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
To improve PI performance of a mass flow controller, the mass flow controller changes a proportional coefficient, an integral coefficient, and a derivative coefficient used for PID operation in a stable state based on at least two out of a primary pressure, a time change amount of the primary pressure, and a flow rate set value.