The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Jun. 27, 2006
Applicant:
Jong Won Kim, Paju-si, KR;
Inventor:
Jong Won Kim, Paju-si, KR;
Assignee:
LG Display Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate-chucking electrostatic chuck (ESC) is disclosed which is sub-divided into at least three groups of electrostatic blocks, to uniformly chuck the substrate. A substrate bonding apparatus and method for a liquid crystal display (LCD) panel using the electrostatic chuck is also disclosed. The ESC includes at least three groups of electrostatic blocks which chuck the substrate using electrostatic chucking forces respectively generated by different voltages applied to the electrostatic blocks in association with the electrostatic block groups, and release the chucked substrate when the voltages are cut off.