The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Oct. 20, 2009
Takunori Iki, Chitose, JP;
Takunori Iki, Chitose, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A capacitor element includes a lower conductive portion, an underlying film which covers the lower conductive portion, a lower electrode formed on the underling film, a capacitor insulating film including (i) a dielectric film formed on the lower electrode and (ii) a protective film formed on the dielectric film and having a lower etching rate than that of the dielectric film, and an upper electrode formed on the capacitor insulating film. The upper electrode and the lower conductive portion are electrically connected to each other through a connection portion exposed from the underlying film by partially removing the underlying film and the capacitor insulating film.