The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Nov. 08, 2002
Shawn Jay Cunningham, Colorado Springs, CO (US);
Dana Richard Dereus, Colorado Springs, CO (US);
Subham Sett, Colorado Springs, CO (US);
John Richard Gilbert, Brookline, MA (US);
Shawn Jay Cunningham, Colorado Springs, CO (US);
Dana Richard DeReus, Colorado Springs, CO (US);
Subham Sett, Colorado Springs, CO (US);
John Richard Gilbert, Brookline, MA (US);
Wispry, Inc., Irvine, CA (US);
Abstract
MEMS Device having Electrothermal Actuation and Release and Method for Fabricating. According to one embodiment, a microscale switch is provided and can include a substrate and a stationary electrode and stationary contact formed on the substrate. The switch can further include a movable microcomponent suspended above the substrate. The microcomponent can include a structural layer including at least one end fixed with respect to the substrate. The microcomponent can further include a movable electrode spaced from the stationary electrode and a movable contact spaced from the stationary electrode. The microcomponent can include an electrothermal component attached to the structural layer and operable to produce heating for generating force for moving the structural layer.