The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Jul. 29, 2009
Applicants:
Junji Mori, Kanagawa, JP;
Katsuhiro Takushima, Tokyo, JP;
Inventors:
Junji Mori, Kanagawa, JP;
Katsuhiro Takushima, Tokyo, JP;
Assignee:
Hoya Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/68 (2012.01); G03F 1/82 (2012.01);
U.S. Cl.
CPC ...
Abstract
Cleaning is carried out by using a sulfuric acid type detergent at a resist stripping and cleaning step (step) in a semitranslucent portion forming process and a resist stripping and cleaning step (step) in a shielding band forming process, and a sulfuric acid removing step of partially or wholly removing a surface layer portion in a pattern into which a sulfate ion is adsorbed is then carried out to effectively remove the adsorbed sulfate ion.