The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
May. 13, 2009
Lee Chow, Orlando, FL (US);
Oleg Lupan, Chisinau, MD;
Guangyu Chai, Orlando, FL (US);
University of Central Florida Research Foundation, Inc., Orlando, FL (US);
Abstract
The nanofabrication of a hydrogen gas nanosensor device from single straight and branched, tripod shaped ZnO nanorods using in-situ lift-out technique, performed in the chamber of a focused ion beam (FIB) system is disclosed. Self-assembled ZnO branched nanorods have been grown by a cost-effective and fast synthesis route using an aqueous solution deposition method and rapid thermal processing. The properties of the ZnO nanorod structures were analyzed by X-ray diffraction, scanning electron microscopy, energy dispersion X-ray spectroscopy, transmission electron microscopy and micro-Raman spectroscopy. High quality ZnO nanorods were obtained with a 90% success rate for building nanodevices. The fabricated nanosensor can gauge 150 ppm hydrogen gas in the air at room temperature. The nanosensor has selectivity for other gases such as oxygen, methane, carbon monoxide and liquid propane gas. The ZnO nanorod sensors of the present invention also operate at low power of less than 5 microwatts.