The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Mar. 25, 2009
Yun-fei LI, Fremont, CA (US);
Ronghui Zhou, Fremont, CA (US);
Guanghong Luo, Fremont, CA (US);
Ming Jiang, San Jose, CA (US);
Yun-Fei Li, Fremont, CA (US);
Ronghui Zhou, Fremont, CA (US);
Guanghong Luo, Fremont, CA (US);
Ming Jiang, San Jose, CA (US);
Western Digital (Fremont), LLC, Fremont, CA (US);
Abstract
Methods of producing magnetic recording heads are disclosed. The methods can include providing a wafer comprising a substrate layer in which are disposed a plurality of damascene trenches. The method can further include depositing a pole material across the whole wafer, wherein the plurality of trenches are filled with the pole material. The methods can further include depositing a mask material over the pole material across the whole wafer. The methods can further include performing a first material removal process across the whole wafer to remove the mask material and a first portion of the pole material at a same material removal rate. The methods can further include performing a second material removal process to remove a second portion of the pole material above the substrate layer.