The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2012
Filed:
Mar. 21, 2007
Applicant:
Nobuhiko Nishide, Kyoto, JP;
Inventor:
Nobuhiko Nishide, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate processing apparatus includes a substrate holding and rotating mechanism for holding and rotating a substrate; a positioning member disposed on the substrate holding and rotating mechanism for positioning a substrate at a predetermined substrate holding position; a substrate transfer mechanism for transferring a substrate to the substrate holding and rotating mechanism; and a pressing unit disposed on the substrate transfer mechanism for pressing a substrate toward the positioning member.
Nishide, Nobuhiko. (2012). Substrate processing apparatus and substrate transferring method (U.S. Patent No. 8262799). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8262799
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile